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Arindom Datta외부 협력 연구자
Arindom Datta
4
논문
0
교신저자
2001–2003
활동 기간
Other3
소개
Arindom Datta는 2002~2003년경 알루미늄 중간층 최적화, 다층 확산 장벽 등 박막·재료공학 분야 논문에 참여한 외부 연구자로, 남기태 연구실(BMNL)의 핵심 연구 주제와는 무관한 협력자로 판단된다.
참여 논문 (3)
2003
View Online Export Citation RESEARCH ARTICLE | MARCH 17 2003 Multilayer diffusion barrier for copper metallization using a thin interlayer metal Cr, and Zr) between two TiN films Soo-Hyun Kim; Ki Tae Nam; Arindom Datta; Hyun-Mi Kim; Ki-Bum Kim; Dae-Hwan Kang
Other
2002
View Online Export Citation RESEARCH ARTICLE | NOVEMBER 01 2002 Failure mechanism of a multilayer (TiN/Al/TiN) diffusion barrier between copper and silicon Soo-Hyun Kim; Ki Tae Nam; Arindom Datta; Ki-Bum Kim
Other
2002
View Online Export Citation RESEARCH ARTICLE | JULY 15 2002 Optimization of Al interlayer thickness for the multilayer diffusion barrier scheme in Cu metallization Arindom Datta; Ki Tae Nam; Soo-Hyun Kim; Ki-Bum Kim
Other